Annotation of the article

Issue N1 2017 year

DOI: 10.17587/nmst.19.53-59

Influence of the Technological Errors of Manufacturing of the Microsystem Vibration Modulator of Electric Fields on its Characteristics

Dorofeev R.Yu., Head of the Group, e-mail: rdorof@yandex.ru, Russian Space Systems Co., Kozlov D.V., Ph. D., Leading Researcher, e-mail: risc3@mail.ru, Smirnov I.P., Section Chief, e-mail: mf77-1@yandex.ru, Zhukov A.A., D. Sc., Chief Researcher, e-mail: lidro@yandex.ru, JSC "Russian Space Systems", Moscow, 111250, Russian Federation

The paper presents a technological sequence for manufacturing of a microsystem vibration modulator of the electric fields. The process of electrochemical etching of the shielding electrode of the vibration modulator is defined as the critical phase of the manufacturing technology of the vibration modulator. The paper also presents the results of measurement of the volumes of the etched material for five groups of the shielding electrodes, analysis of the effect of the electrochemical etching on the basic parameters of the vibration of the modulator, and the dependence of the resonance frequency on the manufacturing technology. The paper demonstrates a possibility of manufacturing a vibration modulator workable under the negative impact of the process of electrochemical etching.

Keywords: microsystem vibration modulator of electric fields, electrochemical etching, shielding electrode, resonance frequency

pp. 53 - 59